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Title
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XPS study of ion induced oxidation of silicon with and without oxygen flooding
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Author
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Language
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English
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Source (book)
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Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry, Brussels, 5-11 September 1999 / Benninghoven, A. [edit.]
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Publication
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Amsterdam
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Elsevier
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2000
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Volume/pages
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p. 73-76
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