Publication
Title
XPS study of ion induced oxidation of silicon with and without oxygen flooding
Author
Language
English
Source (book)
Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry, Brussels, 5-11 September 1999 / Benninghoven, A. [edit.]
Publication
Amsterdam : Elsevier, 2000
Volume/pages
p. 73-76
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 12.09.2013
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