Publication
Title
Kinetic modeling of relaxation phenomena after photodetachment in a rf electronegative $SiH_{4}$ discharge
Author
Abstract
 The global relaxation process after pulsed laser induced photodetachment in a rf electronegative SIH4 discharge is studied by a self-consistent kinetic one-dimensional particle-in-cell-Monte Carlo model. Our results reveal a comprehensive physical picture of the relaxation process, including the main plasma variables, after a perturbation up to the full recovery of the steady state. A strong influence of the photodetachment on the discharge is found, which results from an increase of the electron density, leading to a weaker bulk field, and hence to a drop in the high energy tail of the electron energy distribution function (EEDF), a reduction of the reaction rates of electron impact attachment and ionization, and a subsequent decrease of the positive and negative ion densities. All the plasma quantities related to electrons recover synchronously. The recovery time of the ion densities is about 1-2 orders of magnitude longer than that of the electrons due to different recovery mechanisms. The modeled behavior of all the charged particles agrees very well with experimental results from the literature. In addition, our work clarifies some unclear processes assumed in the literature, such as the relaxation of the EEDF, the evolution of the electric field, and the recovery of negative ions.
Language
English
Source (journal)
Physical review : E : statistical, nonlinear, and soft matter physics / American Physical Society. - Melville, N.Y., 2001 - 2015
Publication
Melville, N.Y. : American Physical Society, 2001
ISSN
1539-3755 [print]
1550-2376 [online]
Volume/pages
63:2Part 2(2001), 9 p.
Article Reference
026405
ISI
000167022500057
Medium
E-only publicatie
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
 Faculty/Department Research group Publication type Subject Affiliation Publications with a UAntwerp address
External links
 Web of Science
Record
 Identification Creation 08.10.2008 Last edited 12.06.2017 To cite this reference