Title
Kinetic modeling of relaxation phenomena after photodetachment in a rf electronegative <tex>$SiH_{4}$</tex> discharge Kinetic modeling of relaxation phenomena after photodetachment in a rf electronegative <tex>$SiH_{4}$</tex> discharge
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Melville, N.Y. :American Physical Society ,
Subject
Physics
Source (journal)
Physical review : E : statistical, nonlinear, and soft matter physics / American Physical Society. - Melville, N.Y., 2001 - 2015
Volume/pages
63(2001) :2Part 2 , 9 p.
ISSN
1539-3755
1550-2376
1063-651X
ISI
000167022500057
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
The global relaxation process after pulsed laser induced photodetachment in a rf electronegative SIH4 discharge is studied by a self-consistent kinetic one-dimensional particle-in-cell-Monte Carlo model. Our results reveal a comprehensive physical picture of the relaxation process, including the main plasma variables, after a perturbation up to the full recovery of the steady state. A strong influence of the photodetachment on the discharge is found, which results from an increase of the electron density, leading to a weaker bulk field, and hence to a drop in the high energy tail of the electron energy distribution function (EEDF), a reduction of the reaction rates of electron impact attachment and ionization, and a subsequent decrease of the positive and negative ion densities. All the plasma quantities related to electrons recover synchronously. The recovery time of the ion densities is about 1-2 orders of magnitude longer than that of the electrons due to different recovery mechanisms. The modeled behavior of all the charged particles agrees very well with experimental results from the literature. In addition, our work clarifies some unclear processes assumed in the literature, such as the relaxation of the EEDF, the evolution of the electric field, and the recovery of negative ions.
Full text (open access)
https://repository.uantwerpen.be/docman/irua/483d82/8076.pdf
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