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Title
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Nonadditive sputtering of silicon by keV energy molecular projectiles of heavy and light elements
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Author
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Language
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English
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Source (journal)
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International journal of mass spectrometry and ion processes. - Amsterdam, 1983 - 1998
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Publication
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Amsterdam
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2001
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ISSN
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0168-1176
[print]
1873-2801
[online]
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DOI
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10.1016/S1387-3806(01)00489-4
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Volume/pages
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209
(2001)
, p. 141-152
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ISI
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000171430000005
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Full text (Publisher's DOI)
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