Title
1D fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers 1D fluid model for an rf methane plasma of interest in deposition of diamond-like carbon layers
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
New York, N.Y. :American Institute of Physics ,
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Volume/pages
90(2001) , p. 570-579
ISSN
0021-8979
1089-7550
ISI
000169660000007
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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