Publication
Title
Modeling of bombardment induced oxidation of silicon
Author
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics , 2001
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
89 :5 (2001) , p. 3001-3011
ISI
000167133000077
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identifier
Creation 08.10.2008
Last edited 15.12.2021
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