Title
Effect of small amounts of hydrogen added to argon glow discharges: hybrid Monte-Carlo-fluid model
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Melville, N.Y. :American Physical Society ,
Source (journal)
Physical review : E : statistical, nonlinear, and soft matter physics / American Physical Society. - Melville, N.Y., 2001 - 2015
Volume/pages
65(2002) , p. 056402-
ISSN
1539-3755
1550-2376
ISI
000176552500086
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A hybrid Monte Carlofluid modeling network is developed for an argon-hydrogen mixture, to predict the effect of small amounts of hydrogen added to a dc argon glow discharge. The species considered in the model include the Ar gas atoms, electrons, Ar+ ions and fast Ar atoms, ArH+, H+, H+2 and H+3 ions, and H atoms and H2 molecules, as well as Ar metastable atoms, sputtered Cu atoms, and the corresponding Cu+ ions. Sixty-five reactions between these species are incorporated in the model. The effect of hydrogen on various calculation results is investigated, such as the species densities, the relative role of different production and loss processes for the various species, the cathode sputtering rate and contributions by different bombarding species, and the dissociation degree of H2 and the ionization degree of Ar and Cu. The calculation results are presented and discussed for 1% H2 addition, and comparison is also made with a pure argon discharge and with only 0.1% H2 addition.
Full text (open access)
https://repository.uantwerpen.be/docman/irua/46309f/8083.pdf
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