Modeling of magnetron and glow discharges

Publication

Title				Modeling of magnetron and glow discharges

Author				Bogaerts, Annemie Kolev, Ivan

Language				English

Source (journal)				Le vide: science, technique et applications

Publication				2002

Volume/pages				57 :304 (2002) , p. 296-307

ISI				000176570200006

UAntwerpen

Faculty/Department				Faculty of Sciences. Chemistry

Publication type				A1 Journal article

Affiliation				Publications with a UAntwerp address

External links

Web of Science

Record

Identifier

Creation

08.10.2008

Last edited

04.03.2024

To cite this reference