Publication
Title
Comparison of a one-dimensional particle-in-cell-Monte Carlo model and a one-dimensional fluid model for a capacitively coupled radio frequency discharge
Author
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 2002
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
91:10(2002), p. 6296-6302
ISI
000175572500007
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 08.07.2017
To cite this reference