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Title
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Numerical modelling of gas discharge plasmas for various applications
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Author
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Abstract
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| Gas discharge plasmas are used for a wide range of applications. To improve our understanding about gas discharges, which is necessary to obtain good results in the various application fields, we perform numerical modelling of gas discharge plasmas. Various kinds of modelling approaches, for various types of gas discharges, are being used in our group. In this paper, some examples of this modelling work are outlined. (C) 2002 Elsevier Science Ltd. All rights reserved. |
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Language
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English
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Source (journal)
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Vacuum: the international journal and abstracting service for vacuum science and technology. - Oxford
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Vacuum: surface engineering, surface instrumentation & vacuum technology
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Publication
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Oxford
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2003
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ISSN
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0042-207X
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DOI
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10.1016/S0042-207X(02)00306-8
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Volume/pages
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69
(2003)
, p. 37-52
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ISI
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000180739000006
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Full text (Publisher's DOI)
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Full text (publisher's version - intranet only)
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