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Effect of the relaxation of the electron subsystem excitation in metals on the ionization probability of sputtered ions
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| Abstract |
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| A model describing the effect of the relaxation of the electron subsystem excitation in metals on the ionization process of sputtered atoms is proposed. It explains the strong difference in experimental velocity dependence of the ionization probability P+ of sputtered atoms measured for the same Ar+-Cu system. (C) 2003 Elsevier Science B.V. All rights reserved. | |
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English
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| Source (journal) |
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Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam |
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| Publication |
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Amsterdam : 2003
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| ISSN |
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0168-583X
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| Volume/pages |
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203(2003), p. 172-177
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| ISI |
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000182624600028
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| Full text (publisher's version - intranet only) |
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