Title
Determination of arsenic distribution across <tex>$SiO^{2}/Si$</tex> interfaces with secondary ion mass spectrometry, using <tex>$Ar^{+}$</tex> bombardment and the internal indicator methodDetermination of arsenic distribution across <tex>$SiO^{2}/Si$</tex> interfaces with secondary ion mass spectrometry, using <tex>$Ar^{+}$</tex> bombardment and the internal indicator method
Author
Faculty/Department
Faculty of Applied Economics
Faculty of Sciences. Chemistry
Research group
Department of Chemistry - other
Publication type
article
Publication
London,
Source (journal)
Surface and interface analysis. - London
Volume/pages
18(1992), p. 539-544
ISSN
0142-2421
ISI
A1992JE10000013
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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