Title
Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency <tex>$Ar/Cf_{4}$</tex> discharge: effect of gas composition Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency <tex>$Ar/Cf_{4}$</tex> discharge: effect of gas composition
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
New York, N.Y. :American Institute of Physics ,
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Volume/pages
93(2003) , p. 2369-2379
ISSN
0021-8979
1089-7550
ISI
000181307000007
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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