Publication
Title
Numerical study of discharges in single and dual frequency capacitively coupled plasma reactors
Author
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 2003
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
94(2003), p. 3748-3756
ISI
000185419600009
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 05.09.2017
To cite this reference