Publication
Title
PIC-MC simulation of an RF capacitively coupled discharge
Author
Language
English
Source (journal)
Nuclear instruments and methods in physics research: B
Publication
2003
Volume/pages
202(2003), p. 300-304
ISI
000182122500048
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 12.11.2017
To cite this reference