Title
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PIC-MC simulation of an RF capacitively coupled discharge
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Author
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Language
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English
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Source (journal)
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Nuclear instruments and methods in physics research: B
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Publication
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2003
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DOI
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10.1016/S0168-583X(02)01873-6
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Volume/pages
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202
(2003)
, p. 300-304
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ISI
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000182122500048
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Full text (Publisher's DOI)
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