Publication
Title
Dynamic Monte Carlo simulation for reactive sputtering of aluminium
Author
Language
English
Source (journal)
Nuclear instruments and methods in physics research: B
Publication
2003
Volume/pages
207(2003), p. 415-423
ISI
000184051300006
Full text (Publishers DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 01.05.2017
To cite this reference