Title
Dynamic Monte Carlo simulation for reactive sputtering of aluminium Dynamic Monte Carlo simulation for reactive sputtering of aluminium
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Source (journal)
Nuclear instruments and methods in physics research: B
Volume/pages
207(2003) , p. 415-423
ISI
000184051300006
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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