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Title
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A one-dimensional fluid model for an acetylene rf discharge: a study of the plasma chemistry
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Author
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Language
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English
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Source (journal)
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IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
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Publication
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New York, N.Y.
:
2003
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ISSN
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0093-3813
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DOI
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10.1109/TPS.2003.815249
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Volume/pages
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31
(2003)
, p. 659-664
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ISI
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000184833400022
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Full text (Publisher's DOI)
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