Title
One-dimensional modelling of a capacitively coupled rf plasma in silane/helium, including small concentrations of <tex>$O_{2}$</tex> and <tex>$N_{2}$</tex>
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
London ,
Source (journal)
Journal of physics: D: applied physics. - London
Volume/pages
36(2003) , p. 1826-1833
ISSN
0022-3727
ISI
000185153600014
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
E-info
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Handle