Publication
Title
One-dimensional modelling of a capacitively coupled rf plasma in silane/helium, including small concentrations of and
Author
Language
English
Source (journal)
Journal of physics: D: applied physics. - London
Publication
London : 2003
ISSN
0022-3727
Volume/pages
36(2003), p. 1826-1833
ISI
000185153600014
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 01.05.2017
To cite this reference