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Title
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One-dimensional modelling of a capacitively coupled rf plasma in silane/helium, including small concentrations of and
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Author
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Language
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English
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Source (journal)
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Journal of physics: D: applied physics. - London
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Publication
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London
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2003
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ISSN
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0022-3727
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Volume/pages
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36
(2003)
, p. 1826-1833
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ISI
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000185153600014
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