Title
Numerical investigation of ion energy distribution functions in single and dual frequency capacitively coupled plasma reactors Numerical investigation of ion energy distribution functions in single and dual frequency capacitively coupled plasma reactors
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Lancaster, Pa ,
Source (journal)
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000
Volume/pages
69(2004) , p. 026406-
ISSN
1063-651X
1095-3787
ISI
000220255500058
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Full text (open access)
https://repository.uantwerpen.be/docman/irua/045f51/8106.pdf
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