Numerical investigation of ion energy distribution functions in single and dual frequency capacitively coupled plasma reactors

Title

Author

Language

English

Source (journal)

Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000

Publication

Lancaster, Pa : 2004

ISSN

1063-651X [print]

1095-3787 [online]

DOI

10.1103/PHYSREVE.69.026406

Volume/pages

69 (2004) , p. 026406

ISI

000220255500058

Full text (Publisher's DOI)

Full text (open access)

Faculty/Department				Faculty of Sciences. Chemistry

Research group				Plasma Lab for Applications in Sustainability and Medicine - Antwerp (PLASMANT)
Project info
Publication type				A1 Journal article

Affiliation				Publications with a UAntwerp address

Web of Science

Identifier

Creation

08.10.2008

Last edited

15.12.2021

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