| Title |
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Numerical investigation of particle formation mechanisms in silane discharges
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| Author |
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| Language |
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English
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| Source (journal) |
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Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000 | |
| Publication |
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Lancaster, Pa : 2004
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| ISSN |
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1063-651X [print]
1095-3787 [online]
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| Volume/pages |
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69(2004), p. 056409,1-16
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| ISI |
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000221813400085
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| Full text (Publisher's DOI) |
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