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Title
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Numerical investigation of particle formation mechanisms in silane discharges
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Author
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Language
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English
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Source (journal)
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Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000
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Publication
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Lancaster, Pa
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2004
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ISSN
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1063-651X
[print]
1095-3787
[online]
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Volume/pages
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69
(2004)
, p. 056409,1-16
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ISI
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000221813400085
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Full text (Publisher's DOI)
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