Publication
Title
Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model
Author
Language
English
Source (journal)
IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
Publication
New York, N.Y. : 2004
ISSN
0093-3813
Volume/pages
32:2(2004), p. 691-698
ISI
000222278400026
Full text (Publishers DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 07.03.2017
To cite this reference