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Title
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Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model
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Author
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Language
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English
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Source (journal)
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IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
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Publication
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New York, N.Y.
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2004
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ISSN
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0093-3813
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Volume/pages
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32
:2
(2004)
, p. 691-698
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ISI
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000222278400026
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Full text (Publisher's DOI)
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