| Title |
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Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model
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| Language |
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English
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| Source (journal) |
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IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y. | |
| Publication |
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New York, N.Y. : 2004
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| ISSN |
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0093-3813
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| Volume/pages |
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32:2(2004), p. 691-698
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| ISI |
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000222278400026
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| Full text (Publishers DOI) |
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