Title
Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
New York, N.Y. ,
Source (journal)
IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
Volume/pages
32(2004) :2 , p. 691-698
ISSN
0093-3813
ISI
000222278400026
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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Handle