Title
Incorporating the gas flow in a numerical model of rf discharges in methane Incorporating the gas flow in a numerical model of rf discharges in methane
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
New York, N.Y. :American Institute of Physics ,
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Volume/pages
96(2004) :6 , p. 3070-3076
ISSN
0021-8979
1089-7550
ISI
000223720000005
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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Handle