Title |
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Sputtering of polyatomic ions: revisiting kinetic energy distributions of secondary ions
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam |
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Publication |
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Amsterdam : Elsevier science bv, 2004
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ISSN |
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0168-583X
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Volume/pages |
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219/220(2004), p. 215-220
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ISI |
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000221895800041
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Full text (Publisher's DOI) |
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