| Title |
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Sputtering of polyatomic ions: revisiting kinetic energy distributions of secondary ions
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| Author |
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| Abstract |
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| Language |
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English
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| Source (journal) |
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Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam |
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| Publication |
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Amsterdam : Elsevier science bv, 2004
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| ISSN |
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0168-583X
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| Volume/pages |
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219/220(2004), p. 215-220
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| ISI |
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000221895800041
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| Full text (Publisher's DOI) |
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