Title
Sputtering of polyatomic ions: revisiting kinetic energy distributions of secondary ions Sputtering of polyatomic ions: revisiting kinetic energy distributions of secondary ions
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Amsterdam :Elsevier science bv ,
Amsterdam
Subject
Physics
Engineering sciences. Technology
Source (journal)
Nuclear instruments and methods in physics research: B: beam interactions with materials and atoms. - Amsterdam
Volume/pages
219/220(2004) , p. 215-220
219(2004) , p. 215-220
ISSN
0168-583X
0168-583X
ISI
000221895800041
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A new more accurate data processing procedure for calibration of kinetic energies of secondary ions measured in magnetic sector secondary ion mass spectrometers has been developed. The procedure was applied to reprocessing of raw data from previously published measurements of kinetic energy spectra of secondary atomic and cluster ions sputtered from Ta by 6 keV/atom Au(-), Au(2)(-) and Au(3)(-) projectiles. Absolute energies of the sputtered Ta ions were determined more accurately, which permitted a fairer comparison of energy spectra for the same secondary ions measured under bombardment with different primary ions. Most probable and mean energies were determined for the sputtered ions, and their energy spectra were converted into distributions over inverse velocities. The reprocessed experimental results revealed strong differences between results for atomic and diatomic ions and those for larger cluster ions (consisting of more than seven atoms). In particular, the comparison of atomic and polyatomic bombardment showed that there are strong differences between atomic and diatomic sputtered species, while there were almost no changes between larger sputtered clusters. Results are discussed in terms of observed enhancements under polyatomic ion bombardment for the total sputtering efficiency and the ionization of sputtered species. (C) 2004 Elsevier B.V. All rights reserved.
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