Publication
Title
Modeling of the formation and transport of nanoparticles in silane plasmas
Author
de Bleecker, Kathleen
Bogaerts, Annemie
Goedheer, Wim
Abstract
Language
English
Source (journal)
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000
Publication
Lancaster, Pa
:
2004
ISSN
1063-651X [print]
1095-3787 [online]
Volume/pages
70(2004), p. 056407,1-8
ISI
000225970700092
Full text (Publisher's DOI)
https://doi.org/10.1103/PHYSREVE.70.056407
Full text (open access)
https://repository.uantwerpen.be/docman/irua/4eb7f5/8107.pdf
UAntwerpen
Faculty/Department
Faculty of Sciences. Chemistry
Research group
Plasma, laser ablation and surface modeling - Antwerp (PLASMANT)
Publication type
A1 Journal article
Affiliation
Publications with a UAntwerp address
External links
Web of Science
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Record
Identification
Creation
08.10.2008
Last edited
17.06.2018
To cite this reference
http://hdl.handle.net/10067/494320151162165141