| Title |
|
|
|
Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux
| |
| Author |
|
|
|
| |
| Language |
|
|
|
English
| |
| Source (journal) |
|
|
|
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens | |
| Publication |
|
|
|
Bristol : Institute of Physics, 2005
| |
| ISSN |
|
|
|
0963-0252
| |
| Volume/pages |
|
|
|
14(2005), p. 191-200
| |
| ISI |
|
|
|
000227652500021
| |
| Full text (Publisher's DOI) |
|
|
| | |
|