Title
Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Bristol :Institute of Physics ,
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Volume/pages
14(2005) , p. 191-200
ISSN
0963-0252
ISI
000227652500021
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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Handle