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Title
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Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux
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Author
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Language
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English
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Source (journal)
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Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens
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Publication
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Bristol
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Institute of Physics
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2005
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ISSN
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0963-0252
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DOI
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10.1088/0963-0252/14/1/021
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Volume/pages
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14
(2005)
, p. 191-200
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ISI
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000227652500021
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Full text (Publisher's DOI)
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