| Title |
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Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux
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| Author |
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| Language |
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English
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| Source (journal) |
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Plasma sources science and technology / Institute of Physics [Londen] - Bristol, 1992, currens | |
| Publication |
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Bristol : Institute of Physics, 2005
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| ISSN |
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0963-0252
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| Volume/pages |
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14(2005), p. 191-200
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| ISI |
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000227652500021
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| Full text (Publisher's DOI) |
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