Publication
Title
Hollow cathode discharges with gas flow: numerical modelling for the effect on the sputtered atoms and the deposition flux
Author
Language
English
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Publication
Bristol : Institute of Physics, 2005
ISSN
0963-0252
Volume/pages
14(2005), p. 191-200
ISI
000227652500021
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 31.07.2017
To cite this reference