Title
Influence of electron recapture by the cathode upon the discharge characteristics in dc planar magnetrons Influence of electron recapture by the cathode upon the discharge characteristics in dc planar magnetrons
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Lancaster, Pa ,
Source (journal)
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000
Volume/pages
72(2005) , p. 056402,1-11
ISSN
1063-651X
1095-3787
ISI
000233603200089
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
In dc magnetrons the electrons emitted from the cathode may return there due to the applied magnetic field. When that happens, they can be recaptured or reflected back into the discharge, depending on the value of the reflection coefficient (RC). A 2d3v (two-dimensional in coordinate and three-dimensional in velocity space) particle-in-cellMonte Carlo model, including an external circuit, is developed to determine the role of the electron recapture in the discharge processes. The detailed discharge structure as a function of RC for two pressures (4 and 25mtorr) is studied. The importance of electron recapture is clearly manifested, especially at low pressures. The results indicate that the discharge characteristics are dramatically changed with varying RC between 0 and 1. Thus, the electron recapture at the cathode appears to be a significant mechanism in magnetron discharges and RC a very important parameter in their correct quantitative description that should be dealt with cautiously.
Full text (open access)
https://repository.uantwerpen.be/docman/irua/a4c228/8119.pdf
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