Publication
Title
Why are sputter deposited thin films flatter than films?
Author
Language
English
Source (journal)
Applied physics letters / American Institute of Physics. - New York, N.Y., 1962, currens
Publication
New York, N.Y. : American Institute of Physics, 2001
ISSN
0003-6951 [print]
1077-3118 [online]
Volume/pages
79:22(2001), p. 3660-3662
ISI
000172204400034
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 05.09.2017
To cite this reference