Title |
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A microstructural study of the thermal stability of atomic layer deposited thin films
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Author |
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Abstract |
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Language |
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English
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Source (journal) |
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CONFERENCE SERIES- INSTITUTE OF PHYSICS | |
Source (book) |
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Microscopy of semiconducting materials | |
Publication |
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Cambridge : IOP, 2003
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ISBN |
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0-7503-0979-2
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Volume/pages |
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(2003), p. 397-400
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ISI |
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000222976100091
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