| Title |
|
|
|
A microstructural study of the thermal stability of atomic layer deposited thin films
| |
| Author |
|
|
|
| |
| Abstract |
|
|
| | |
| Language |
|
|
|
English
| |
| Source (journal) |
|
|
|
CONFERENCE SERIES- INSTITUTE OF PHYSICS | |
| Source (book) |
|
|
|
Microscopy of semiconducting materials | |
| Publication |
|
|
|
Cambridge : IOP, 2003
| |
| ISBN |
|
|
|
0-7503-0979-2
| |
| Volume/pages |
|
|
|
(2003), p. 397-400
| |
| ISI |
|
|
|
000222976100091
| |
|