Publication
Title
A microstructural study of the thermal stability of atomic layer deposited thin films
Author
Abstract
Language
English
Source (journal)
CONFERENCE SERIES- INSTITUTE OF PHYSICS
Source (book)
Microscopy of semiconducting materials
Publication
Cambridge : IOP, 2003
ISBN
0-7503-0979-2
Volume/pages
(2003), p. 397-400
ISI
000222976100091
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 15.04.2018
To cite this reference