Title
Influence of the <tex>$Ar/O_{2}$</tex> ratio on the growth and biaxial alignment of yttria stabilized zirconia layers during reactive unbalanced magnetron sputtering Influence of the <tex>$Ar/O_{2}$</tex> ratio on the growth and biaxial alignment of yttria stabilized zirconia layers during reactive unbalanced magnetron sputtering
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Lausanne ,
Source (journal)
Thin solid films: an international journal on the science and technology of thin and thick films. - Lausanne
Volume/pages
484(2005) , p. 18-25
ISSN
0040-6090
ISI
000230045900003
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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