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Title
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PIC - MCC numerical simulation of a DC planar magnetron
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Author
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Language
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English
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Source (journal)
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Plasma processes and polymers. - Weinheim
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Publication
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Weinheim
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2006
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ISSN
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1612-8850
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DOI
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10.1002/PPAP.200500118
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Volume/pages
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3
:2
(2006)
, p. 127-134
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ISI
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000235628300005
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Full text (Publisher's DOI)
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