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Title
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Biaxially aligned titanium nitride thin films deposited by reactive unbalanced magnetron sputtering
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Author
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Language
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English
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Source (journal)
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Surface and coatings technology. - Lausanne
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Publication
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Lausanne
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2006
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ISSN
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0257-8972
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DOI
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10.1016/J.SURFCOAT.2004.09.012
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Volume/pages
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200
:8
(2006)
, p. 2764-2768
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ISI
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000235202100023
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Full text (Publisher's DOI)
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