Title
Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation Nanoparticle growth and transport mechanisms in capacitively coupled silane discharges: a numerical investigation
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
conferenceObject
Publication
Melville, N.Y. :American Institute of Physics, [*]
Source (book)
New vistas in dusty plasmas: Fourth International Conference on the Physics of Dusty Plasmas, Orléans, France, 13-17 June 2005 / Boufendi, L. [edit.]
ISI
000234508900034
Carrier
E
Target language
English (eng)
Affiliation
University of Antwerp
E-info
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Handle