Title
Plasma characteristics of an <tex>$Ar/CF_{4}/N_{2}$</tex> discharge in an asymmetric dual frequency reactor: numerical investigation by a PIC/MC model
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Bristol :Institute of Physics ,
Source (journal)
Plasma sources science and technology / Institute of Physics. - Bristol, 1992, currens
Volume/pages
15(2006) , p. 368-377
ISSN
0963-0252
ISI
000240655500010
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
E-info
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Handle