Title |
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Effect of hydrogen on the growth of thin hydrogenated amorphous carbon films from thermal energy radicals
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Author |
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Language |
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English
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Source (journal) |
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Applied physics letters / American Institute of Physics. - New York, N.Y., 1962, currens | |
Publication |
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New York, N.Y. : American Institute of Physics, 2006
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ISSN |
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0003-6951 [print]
1077-3118 [online]
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Volume/pages |
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88(2006), p. 141922
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ISI |
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000236612000037
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Full text (Publisher's DOI) |
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