Publication
Title
Detailed numerical investigation of a DC sputter magnetron
Author
Language
English
Source (journal)
IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
Publication
New York, N.Y. : 2006
ISSN
0093-3813
Volume/pages
34:3(2006), p. 886-894
ISI
000238582700019
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 04.10.2017
To cite this reference