Title
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Detailed numerical investigation of a DC sputter magnetron
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Author
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Language
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English
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Source (journal)
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IEEE transactions on plasma science / IEEE [New York, N.Y.] - New York, N.Y.
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Publication
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New York, N.Y.
:
2006
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ISSN
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0093-3813
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DOI
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10.1109/TPS.2006.875843
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Volume/pages
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34
:3
(2006)
, p. 886-894
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ISI
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000238582700019
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Full text (Publisher's DOI)
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