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Title
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Molecular dynamics simulations of the growth of thin a-C:H films under additional ion bombardment: influence of the growth species and the ion kinetic energy
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Author
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Language
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English
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Source (journal)
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Chemical vapor deposition. - Weinheim
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Publication
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Weinheim
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2007
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ISSN
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0948-1907
[print]
1521-3862
[online]
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DOI
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10.1002/CVDE.200606551
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Volume/pages
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13
:6/7
(2007)
, p. 312-318
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ISI
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000248381800007
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Full text (Publisher's DOI)
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