Title
Reaction mechanisms and thin a-C:H film growth from low energy hydrocarbon radicals Reaction mechanisms and thin a-C:H film growth from low energy hydrocarbon radicals
Author
Faculty/Department
Faculty of Sciences. Chemistry
Publication type
article
Publication
Bristol ,
Subject
Physics
Source (journal)
Journal of physics : conference series. - Bristol
Volume/pages
86(2007) , p. 12020,1-12020,15
ISSN
1742-6588
1742-6596
Article Reference
12020
Carrier
E-only publicatie
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
Molecular dynamics simulations using the Brenner potential have been performed to investigate reaction mechanisms of various hydrocarbon radicals with low kinetic energies on amorphous hydrogenated carbon (a-C:H) surfaces and to simulate thin a-C:H film growth. Experimental data from an expanding thermal plasma setup were used as input for the simulations. The hydrocarbon reaction mechanisms were studied both during growth of the films and on a set of surface sites specific for a-C:H surfaces. Thin film growth was studied using experimentally detected growth species. It is found that the reaction mechanisms and sticking coefficients are dependent on the specific surface sites, and the structural properties of the growth radicals. Furthermore, it is found that thin a-C:H films can be densified using an additional H-flux towards the substrate.
Full text (open access)
https://repository.uantwerpen.be/docman/irua/9ebc19/1865.pdf
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