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Title
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New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications
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Author
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Language
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English
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Source (journal)
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The review of scientific instruments. - New York, N.Y.
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Publication
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New York, N.Y.
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2007
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ISSN
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0034-6748
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DOI
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10.1063/1.2761021
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Volume/pages
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78
(2007)
, p. 085101,1-9
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ISI
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000249156700044
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Full text (Publisher's DOI)
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