Publication
Title
Simulation of an inductively coupled plasma: study of the effect of bias, power and pressure and comparison with experiments
Author
Abstract
Language
English
Source (journal)
Journal of physics: D: applied physics. - London
Publication
London : 2008
ISSN
0022-3727
Volume/pages
41:6(2008), 14 p.
Article Reference
065207
ISI
000254153900022
Medium
E-only publicatie
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 10.02.2018
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