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Title
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Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge
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Author
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Abstract
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| The properties of a capacitive HF discharge with growing nanoparticles are studied with the use of kinetic PIC-MCC simulation. At the initial stage of growth, the nanoparticles are shown to be localized at the interface between the near-electrode layer and quasi-neutral plasma, where the rate of ionization by electron impact has the maximum value. At the beginning of formation of particles, plasma parameters change rapidly and a transition between the capacitive and spatial discharge burning modes is observed for a certain critical size of the particles. If the growth of the dust particles continues, their distribution over the discharge becomes more uniform and the steady-state parameters of the gas-discharge plasma hardly change. |
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Language
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English
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Source (journal)
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Journal of experimental and theoretical physics letters. - Lancaster, Pa
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Publication
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Lancaster, Pa
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2007
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ISSN
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0021-3640
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DOI
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10.1134/S0021364007210047
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Volume/pages
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86
:9
(2007)
, p. 572-576
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ISI
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000252531900004
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Full text (Publisher's DOI)
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