Publication
Title
Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge
Author
Abstract
The properties of a capacitive HF discharge with growing nanoparticles are studied with the use of kinetic PIC-MCC simulation. At the initial stage of growth, the nanoparticles are shown to be localized at the interface between the near-electrode layer and quasi-neutral plasma, where the rate of ionization by electron impact has the maximum value. At the beginning of formation of particles, plasma parameters change rapidly and a transition between the capacitive and spatial discharge burning modes is observed for a certain critical size of the particles. If the growth of the dust particles continues, their distribution over the discharge becomes more uniform and the steady-state parameters of the gas-discharge plasma hardly change.
Language
English
Source (journal)
Journal of experimental and theoretical physics letters. - Lancaster, Pa
Publication
Lancaster, Pa : 2007
ISSN
0021-3640
Volume/pages
86:9(2007), p. 572-576
ISI
000252531900004
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.10.2008
Last edited 10.09.2017
To cite this reference