|
Title
|
|
|
|
Plasma-enhanced CVD of amorphous and films
| |
|
Author
|
|
|
|
| |
|
Language
|
|
|
|
English
| |
|
Source (journal)
|
|
|
|
Journal of physics : condensed matter. - London
| |
|
Publication
|
|
|
|
London
:
1993
| |
|
ISSN
|
|
|
|
0953-8984
| |
|
DOI
|
|
|
|
10.1051/JP4:1993358
| |
|
Volume/pages
|
|
|
|
3
(1993)
, p. 419-426
| |
|
ISI
|
|
|
|
A1993MC31900056
| |
|
Full text (Publisher's DOI)
|
|
|
|
| |
|