Plasma-enhanced chemical vapour deposition of amorphous <script type="math/tex">Ge_{x}Se_{1-x}</script> films

Publication

Title				Plasma-enhanced chemical vapour deposition of amorphous $Ge_{x}Se_{1-x}$ films

Author				Sleeckx, E. Nagels, P. Callaerts, R. van Roy, M.

Language				English

Source (journal)				Journal of non-crystalline solids. - Amsterdam

Publication				Amsterdam : 1993

ISSN				0022-3093

Volume/pages				164/166 (1993) , p. 1195-1198

UAntwerpen

Faculty/Department				Faculty of Business and Economics

Research group

Publication type				A1 Journal article

Affiliation				Publications with a UAntwerp address

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08.10.2008

Last edited

07.10.2022

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