Publication
Title
Plasma-enhanced chemical vapour deposition of amorphous films
Author
Language
English
Source (journal)
Journal of non-crystalline solids. - Amsterdam
Publication
Amsterdam : 1993
ISSN
0022-3093
Volume/pages
164/166(1993), p. 1195-1198
UAntwerpen
Faculty/Department
Research group
Publication type
Affiliation
Publications with a UAntwerp address
External links
Record
Identification
Creation 08.10.2008
Last edited 10.07.2013
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