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Title
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Molecular dynamics simulations of the sticking and etch behavior of various growth species of (ultra)nanocrystalline diamond films
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Author
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Abstract
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| The reaction behavior of species that may affect the growth of ultrananocrystal line and nanocrystalline diamond ((U)NCD) films is investigated by means of molecular dynamics simulations. Impacts of CHx (x = 0 - 4), C2Hx (x=0-6), C3Hx (x=0-2), C4Hx (x = 0 - 2), H, and H-2 on clean and hydrogenated diamond (100)2 x 1 and (111) 1 x 1 surfaces at two different substrate temperatures are simulated. We find that the different bonding structures of the two surfaces cause different temperature effects on the sticking efficiency. These results predict a temperature-dependent ratio of diamond (100) and (111) growth. Furthermore, predictions of which are the most important hydrocarbon species for (U)NCD growth are made. |
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Language
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English
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Source (journal)
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Chemical vapor deposition. - Weinheim
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Publication
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Weinheim
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2008
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ISSN
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0948-1907
[print]
1521-3862
[online]
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DOI
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10.1002/CVDE.200706657
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Volume/pages
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14
:7/8
(2008)
, p. 213-223
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ISI
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000259302700008
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Full text (Publisher's DOI)
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