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Title
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The effect of the magnetic field strength on the sheath region of a dc magnetron discharge
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Author
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Abstract
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| A 2d3v particle-in-cell/Monte Carlo collisions model was applied to study the influence of the magnetic field strength on the cathode sheath region of a direct current (dc) magnetron discharge. When applying a magnetic field of 520-730 G, the cathode sheath width decreases with magnetic field strength, whereas, if a stronger magnetic field is applied (i. e. from 730 to 2600 G), the sheath width increases. This is explained by studying the structure of the sheath in different magnetic field strengths in terms of the electron and ion densities. The consequences of sheath structure on the sputter deposition process are also investigated. It is found that the magnetic field strength can control the erosion profile and the sputter rate. |
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Language
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English
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Source (journal)
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Journal of physics: D: applied physics. - London
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Publication
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London
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2008
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ISSN
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0022-3727
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DOI
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10.1088/0022-3727/41/20/202007
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Volume/pages
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41
(2008)
, p. 202007,1-5
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ISI
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000260131700007
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Full text (Publisher's DOI)
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