Title
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Computer simulations of argon-hydrogen Grimm-type glow discharges
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Author
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Abstract
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Computer simulations have been performed to describe the effect of small admixtures of hydrogen to an argon glow discharge in the Grimm-type configuration. The two-dimensional density profiles of the various plasma species (i.e., electrons, Ar+, ArH+, H+, H2+ and H3+ ions, H atoms and H2 molecules, Ar metastable atoms and sputtered Cu atoms) are presented for 1% H2 added to the argon glow discharge, and the effect of different H2 additions (varying between 0.1 and 10%) on the species densities, the hydrogen dissociation degree, and the sputtering process, are investigated. Finally, the relative contributions of various production and loss processes for the different plasma species are calculated. |
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Language
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English
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Source (journal)
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Journal of analytical atomic spectrometry. - London
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Publication
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London
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2008
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ISSN
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0267-9477
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DOI
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10.1039/B810599E
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Volume/pages
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23
(2008)
, p. 1476-1486
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ISI
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000260309700002
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Full text (Publisher's DOI)
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