Publication
Title
Numerical study of the sputtering in a dc magnetron
Author
Abstract
Language
English
Source (journal)
Journal of vacuum science and technology: A: vacuum surfaces and films. - New York, N.Y., 1983, currens
Publication
New York, N.Y. : 2009
ISSN
0734-2101
Volume/pages
27:1(2009), p. 20-28
ISI
000264017300004
Full text (Publisher's DOI)
Full text (publisher's version - intranet only)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 18.12.2008
Last edited 08.01.2018
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