Publication
Title
Reactive sputter deposition of films, simulated with a particle-in-cell/Monte Carlo collisions model
Author
Abstract
Language
English
Source (journal)
New journal of physics / Institute of Physics [Londen]; German Physical Society. - Bristol
Publication
Bristol : 2009
ISSN
1367-2630
Volume/pages
11(2009), p. 023039,1-023039,24
ISI
000263744100001
Full text (Publisher's DOI)
Full text (open access)
UAntwerpen
Faculty/Department
Research group
Project info
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 26.02.2009
Last edited 20.11.2018
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