Publication
Title
Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/
Author
Abstract
We study the properties of a capacitive 13.56 MHz discharge with a mixture of Ar/C2H2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid model was developed to combine the kinetic description for electron motion and the fluid approach for negative and positive ion transports and plasmochemical processes. A significant change in plasma parameters related to injection of 5.8% portion of acetylene in argon was observed and analyzed. We found that the electronegativity of the mixture is about 30%. The densities of negatively and positively charged heavy hydrocarbons are sufficiently large to be precursors for the formation of nanoparticles in the discharge volume.
Language
English
Source (journal)
Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
Publication
New York, N.Y. : American Institute of Physics, 2009
ISSN
0021-8979 [print]
1089-7550 [online]
Volume/pages
105:6(2009), p. 063305,1-063305,9
ISI
000264774000059
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
E-info
Web of Science
Record
Identification
Creation 03.04.2009
Last edited 01.08.2017
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