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Title
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Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/
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Author
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Abstract
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| We study the properties of a capacitive 13.56 MHz discharge with a mixture of Ar/C2H2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid model was developed to combine the kinetic description for electron motion and the fluid approach for negative and positive ion transports and plasmochemical processes. A significant change in plasma parameters related to injection of 5.8% portion of acetylene in argon was observed and analyzed. We found that the electronegativity of the mixture is about 30%. The densities of negatively and positively charged heavy hydrocarbons are sufficiently large to be precursors for the formation of nanoparticles in the discharge volume. |
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Language
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English
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Source (journal)
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Journal of applied physics / American Institute of Physics. - New York, N.Y., 1937, currens
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Publication
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New York, N.Y.
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American Institute of Physics
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2009
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ISSN
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0021-8979
[print]
1089-7550
[online]
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DOI
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10.1063/1.3095760
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Volume/pages
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105
:6
(2009)
, p. 063305,1-063305,9
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ISI
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000264774000059
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Full text (Publisher's DOI)
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