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Title
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Measurement of specimen thickness by phase change determination in TEM
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Author
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Abstract
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| A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential. |
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Language
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English
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Source (journal)
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Ultramicroscopy. - Amsterdam
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Publication
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Amsterdam
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2008
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ISSN
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0304-3991
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DOI
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10.1016/J.ULTRAMIC.2008.06.002
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Volume/pages
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108
:12
(2008)
, p. 1616-1622
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ISI
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000260808300016
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Full text (Publisher's DOI)
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