Title
Measurement of specimen thickness by phase change determination in TEM Measurement of specimen thickness by phase change determination in TEM
Author
Faculty/Department
Faculty of Sciences. Physics
Publication type
article
Publication
Amsterdam ,
Subject
Physics
Source (journal)
Ultramicroscopy. - Amsterdam
Volume/pages
108(2008) :12 , p. 1616-1622
ISSN
0304-3991
ISI
000260808300016
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential.
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