Publication
Title
Measurement of specimen thickness by phase change determination in TEM
Author
Abstract
A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential.
Language
English
Source (journal)
Ultramicroscopy. - Amsterdam
Publication
Amsterdam : 2008
ISSN
0304-3991
Volume/pages
108:12(2008), p. 1616-1622
ISI
000260808300016
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 28.04.2009
Last edited 11.07.2017
To cite this reference