Title
Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamicsEffect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics
Author
Faculty/Department
Faculty of Sciences. Physics
Research group
Condensed Matter Theory
Publication type
article
Publication
Lancaster, Pa,
Subject
Physics
Source (journal)
Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000
Volume/pages
78(2008):2, p. 026410,1-026410,6
ISSN
1063-651X
1095-3787
ISI
000259263700071
Carrier
E
Target language
English (eng)
Full text (Publishers DOI)
Affiliation
University of Antwerp
Abstract
We present experimental and numerical studies of the properties of a capacitively coupled 13.56 MHz discharge in a mixture of Ar and C2H2 with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one.
Full text (open access)
https://repository.uantwerpen.be/docman/irua/298e53/ec35f7e8.pdf
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