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Title
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Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics
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Author
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Abstract
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| We present experimental and numerical studies of the properties of a capacitively coupled 13.56 MHz discharge in a mixture of Ar and C2H2 with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one. |
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Language
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English
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Source (journal)
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Physical review : E : statistical physics, plasmas, fluids, and related interdisciplinary topics. - Lancaster, Pa, 1993 - 2000
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Publication
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Lancaster, Pa
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2008
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ISSN
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1063-651X
[print]
1095-3787
[online]
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Volume/pages
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78
:2
(2008)
, p. 026410,1-026410,6
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ISI
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000259263700071
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Full text (Publisher's DOI)
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Full text (open access)
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