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Title
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Computer modeling of plasmas and plasma-surface interactions
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Author
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Abstract
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| In this paper, an overview is given of different modeling approaches used for describing gas discharge plasmas, as well as plasma-surface interactions. A fluid model is illustrated for describing the detailed plasma chemistry in capacitively coupled rf discharges. The strengths and limitations of Monte Carlo simulations and of a particle-in-cell-Monte Carlo collisions model are explained for a magnetron discharge, whereas the capabilities of a hybrid Monte Carlo-fluid approach are illustrated for a direct current glow discharge used for spectrochemical analysis of materials. Finally, some examples of molecular dynamics simulations, for the purpose of plasma-deposition, are given. |
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Language
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English
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Source (journal)
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Plasma processes and polymers. - Weinheim
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Publication
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Weinheim
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2009
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ISSN
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1612-8850
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DOI
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10.1002/PPAP.200800207
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Volume/pages
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6
:5
(2009)
, p. 295-307
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ISI
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000266471800003
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Full text (Publisher's DOI)
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