Publication
Title
Computer modeling of plasmas and plasma-surface interactions
Author
Abstract
In this paper, an overview is given of different modeling approaches used for describing gas discharge plasmas, as well as plasma-surface interactions. A fluid model is illustrated for describing the detailed plasma chemistry in capacitively coupled rf discharges. The strengths and limitations of Monte Carlo simulations and of a particle-in-cell-Monte Carlo collisions model are explained for a magnetron discharge, whereas the capabilities of a hybrid Monte Carlo-fluid approach are illustrated for a direct current glow discharge used for spectrochemical analysis of materials. Finally, some examples of molecular dynamics simulations, for the purpose of plasma-deposition, are given.
Language
English
Source (journal)
Plasma processes and polymers. - Weinheim
Publication
Weinheim : 2009
ISSN
1612-8850
Volume/pages
6:5(2009), p. 295-307
ISI
000266471800003
Full text (Publisher's DOI)
UAntwerpen
Faculty/Department
Research group
Publication type
Subject
Affiliation
Publications with a UAntwerp address
External links
Web of Science
Record
Identification
Creation 08.06.2009
Last edited 16.09.2017
To cite this reference